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Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications Hardcover - 1993
by Kern, Werner (ed)
- Used
- Fine
- Hardcover
- first
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Details
- Title Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications
- Author Kern, Werner (ed)
- Binding Hardcover
- Condition Used - Fine
- Pages 645
- Volumes 1
- Language ENG
- Publisher Noyes
- Date 1993
- Illustrated Yes
- Bookseller's Inventory # 19455
- ISBN 9780815513315 / 0815513313
- Weight 0.99 lbs (0.45 kg)
- Dimensions 9 x 5.94 x 1.44 in (22.86 x 15.09 x 3.66 cm)
- Library of Congress Catalog Number TK7871.85 .H
- Dewey Decimal Code 621.381
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First line
The importance of clean substrate surfaces in the fabrication of semiconductor microelectronic devices has been recognized since the dawn of solid-state device technology in the 1950s.