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Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)
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Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146) Hardcover - 2005 - 2nd Edition

by Harry J. Levinson

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Details

  • Title Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)
  • Author Harry J. Levinson
  • Binding Hardcover
  • Edition number 2nd
  • Edition 2
  • Condition Used - Good
  • Pages 423
  • Volumes 1
  • Language ENG
  • Publisher SPIE-International Society for Optical Engine, Bellingham, Wa
  • Date 2005-02
  • Illustrated Yes
  • Bookseller's Inventory # 0819456608.G
  • ISBN 9780819456601 / 0819456608
  • Weight 2.43 lbs (1.10 kg)
  • Dimensions 10.34 x 7.26 x 1.19 in (26.26 x 18.44 x 3.02 cm)
  • Library of Congress subjects Microlithography, Integrated circuits - Design and construction
  • Library of Congress Catalog Number 2004025977
  • Dewey Decimal Code 621.381