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Frontiers of Characterization and Metrology for Nanoelectronics: 2007
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Frontiers of Characterization and Metrology for Nanoelectronics: 2007 International Conference on Frontiers of Characterization and Metrology for Nano Hardcover - 2007 - 1st Edition

by David G. Seiler (Editor); Alain C. Diebold (Editor); Robert McDonald (Editor)


From the publisher

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

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  • Title Frontiers of Characterization and Metrology for Nanoelectronics: 2007 International Conference on Frontiers of Characterization and Metrology for Nano
  • Author David G. Seiler (Editor); Alain C. Diebold (Editor); Robert McDonald (Editor)
  • Binding Hardcover
  • Edition number 1st
  • Edition 1
  • Pages 578
  • Volumes 1
  • Language ENG
  • Publisher American Institute of Physics
  • Date 2007-09
  • Illustrated Yes
  • ISBN 9780735404410 / 0735404410
  • Weight 3.5 lbs (1.59 kg)
  • Dimensions 10.89 x 8.69 x 1.43 in (27.66 x 22.07 x 3.63 cm)
  • Library of Congress subjects Integrated circuits - Ultra large scale, Nanoelectronics
  • Library of Congress Catalog Number 2007933649
  • Dewey Decimal Code 621.381
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Frontiers of Characterization and Metrology for Nanoelectronics: 2007 International Conference on...
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Frontiers Of Characterization And Metrology For Nanoelectronics

Frontiers Of Characterization And Metrology For Nanoelectronics

by Editor-David G. Seiler; Editor-Alain C. Diebold; Editor-Robert McDonald; Editor-C. Michael Garner; Editor-Dan Herr; Editor-Rajinder P. Khosla; Editor-Erik M. Secula

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