Skip to content

No image available
No image available

Atomic Layer Deposition Applications 3; Proceedings: Atomic Layer Deposition Applications Symposium (3D--2007--Washington, DC) Paperback - 2007

by Electrochemical Society (Other)


From the publisher

"Third Symposium on Atomic Layer Deposition Applications was held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th meeting of the Electrochemical Society"--P. iii. "Dielectric and semiconductor materials, devices, and processing"--Cover. Includes bibliographical references and index.

Details

  • Title Atomic Layer Deposition Applications 3; Proceedings: Atomic Layer Deposition Applications Symposium (3D--2007--Washington, DC)
  • Author Electrochemical Society (Other)
  • Binding Paperback
  • Edition First Edition
  • Pages 288
  • Volumes 1
  • Language ENG
  • Publisher Electrochemical Society, Pennington, NJ
  • Date 2007
  • Illustrated Yes
  • ISBN 9781566775731 / 1566775736
  • Library of Congress subjects Vapor-plating, Chemical vapor deposition
  • Library of Congress Catalog Number 2008276631
  • Dewey Decimal Code 621.381